Ultra Compact Mass Flow Meter and Controller Modules with RS485 Interface

The ultra compact mass flow controller MFC 2000 Series modules from Axetris (Switzerland) are now also available with RS485 interface. This allows OEMs to build extreme compact, multi-channel gas mixers, splitters, or even more complex systems.

Due to the extremely high turndown ratio of 1000:1 and more, a very large flow range can be measured and controlled with one single module. Regular mass flow controllers cover a range up from 100:1.

All modules are multi-gas, multi-range capable. The high accuracy and repeatability, as well as the fast response time of platinum-based MEMS sensor allows a very precise control of the gas flow.

The modules are available with calibrations for the following gases: Air, N₂, O₂, Ar, CO₂, He, H₂ (more to come) and with ranges 10-3000 sccm (N₂ equivalent).

The products of the MFC 2000 series are now used by customers in the following applications: gas chromatography, mass spectroscopy, thermal analysis, ion mobility spectrometry, leakage measurement, CO₂ laser, bioreactors, plasma treatment and thin film coating. In almost all applications, customers could achieve significant performance gains with Axetris MFC solutions. Specific optimised calibration parameters are available for a wide variety of applications.