Ultra Compact OEM Mass Flow Meters and Controllers  

Axetris (Switzerland) has further expanded its mass flow meter and controller range. With the new flow channel design it is now possible to measure and control extremely low flow ranges with an unprecedented accuracy and stability. The new types support now beside 0…5 V, 4…20 mA, RS232 also RS485.

Beside the ultra compact meter and controller modules designed for system integration, complete stand alone mass flow meters and controllers are offered. The modular built up of the range allows an easy product customization for demanding OEM customer requirements.

All types are multi-gas and multi-range capable. The high accuracy and the fast reaction time of the MEMS based sensing element allows for fast and precise control of the gas flows, even then when disturbance variables are present (for example pressure pulses). The products are available for; Air, N2, O2, Ar, CO2, He, H2 and for flow rates from 10 to 3’000 sccm (full scale, N2 equivalent).

Special calibration sets are available for the most common applications such as leak testing, gas chromatography, thermal analysis, bioreactors, sputtering, CO2 gas lasers control and more. The highly dynamic range allows the combination of various gases and flow ranges in a single unit.