Ultra Compact Mass Flow Controller with High Dynamic Range

Axetris (Switzerland) mass flow meter and controller persuade with a high dynamic range and a turn down ratio from 500 to more than 1000. Actual standard products on the market are, in the most cases, limited to turn down ratios of less than 100:1.

A high dynamic range gives OEM customers a real competitive advantage. This was recently confirmed by a leading manufacturer of analytical instruments (Gas Chromatography), who replaced its complete line of conventional MFC’s with Axetris high performance MFC’s.

In addition it offers OEM customers significant cost reduction potential if different gas and flow ranges can be combined into one single mass flow controller, there by replacing several conventional mass flow controllers.

Besides the ultra compact meter and controller modules designed for system integration, complete stand alone mass flow meters and controllers are offered.

Last but not least Axetris manufactures completely customised gas control systems for multi channel gas mixers and gas splitters

All types are multi-gas and multi-range capable. The excellent accuracy and repeatability and the fast reaction time of the MEMS based sensing element allows for fast and precise control of the gas flows, even then when disturbance variables are present (for example pressure pulses). The products are available for Air, N2, O2, Ar, CO2, He, H2 and for flow rates from 10 to 3’000 sccm (full scale, N2 equivalent).

The following interfaces are supported: 0..5 V, 0…4 mA, RS232 TTL, RS 232 EIA, RS485

Special calibration sets are available for the most common applications such as leak testing, gas chromatography, thermal analysis, bioreactors, thin film, sputtering, CO2 gas lasers control and more.