• New brochure for a new era in process gas analysis

Air Monitoring

New brochure for a new era in process gas analysis

Nov 21 2022

Hiden Analytical offer a new era of process gas analysis from UHV to atmospheric pressure. Their most recent product brochure showcases their HPR-30 Series while providing an insight into Hiden’s range of instruments, sampling inlets and software packages.

The HPR-30 Series are bolt-on vacuum process analysers that offer fast response and precise analysis of gases and vapours.  These analysers feature Hiden’s multi-level software package, which provide user-friendly control of mass spectrometer parameters, complex manipulation of data and control of external devices. The HPR-30 Series is ideal for a variety of applications including leak detection, contamination monitoring, process trend analysis and analysis of high mass species and precursors used in ALD and MOCVD. The standard mass range is 200 amu, but Hiden also offer versions up to 1000 amu.

Optional upgrades include Hiden 3F innovative series of triple filter quadrupole system offering improved abundance sensitivity, part-per-billion (ppb) detection levels and high contamination resistance, making the analysers the perfect choice for analysing aggressive gases in CVD and RIE applications.  

Multiple sampling configurations are available to cater for a full range of process pressure and vacuum system geometry needs.  Models are available with single, or multiple sampling inlets, unheated or heated to enable the sampling of volatile species. 

Systems are available cart mounted and with height adjustment for optimum compatibility between tools.  For pulsed deposition processes, time resolved measurements are provided to 50 ns time resolution.


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IET 34.2 March 2024

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