Reliable gas monitoring for the semiconductor industry

Semiconductor manufacturing involves the use of numerous toxic and highly reactive gases throughout wafer production, from wafer cleaning to chemical mechanical planarisation (CMP), including gases such as HCl and HF. The latter are among the key hazardous air pollutants identified by the US EPA in semiconductor manufacturing. Reliable compliance with applicable exposure limits is essential to protect employees, safeguard equipment and prevent costly production downtime.

Membrapor’s electrochemical gas sensors provide reliable and accurate detection of critical semiconductor gases, including AsH₃ (arsine), B₂H₆ (diborane), HCl (hydrogen chloride), HF (hydrofluoric acid), PH₃ (phosphine) and SiH₄ (silane). All of these gases are covered by our proven 7-Series and 4-Series sensor platforms.

Upon request, we can calibrate sensors specifically for your application and help you identify the optimal gas sensing solution for your monitoring requirements.