Integrated shut-off valve in highly regarded mass flow controllers guarantees leak tightness

The trusted Axetris MFC 2100 Series of mass flow controllers is now also available with an integrated downstream shut-off valve. This offers a perfect combination of the Axetris proprietary Platinum MEMS technology with guaranteed leak tightness for high vacuum applications.

These ultra compact flow controllers feature a fast setting time of <150 ms with a high turn down ratio of >1000:1. Users enjoy excellent repeatability and accuracy with long term stability within a rugged and stable design.

The MFC 2100 Series is recommended for system integration in industrial and analytical applications.