• Integrated shut-off valve in highly regarded mass flow controllers guarantees leak tightness

Environmental Laboratory

Integrated shut-off valve in highly regarded mass flow controllers guarantees leak tightness

Jan 28 2019

The trusted Axetris MFC 2100 Series of mass flow controllers is now also available with an integrated downstream shut-off valve. This offers a perfect combination of the Axetris proprietary Platinum MEMS technology with guaranteed leak tightness for high vacuum applications.

These ultra compact flow controllers feature a fast setting time of <150 ms with a high turn down ratio of >1000:1. Users enjoy excellent repeatability and accuracy with long term stability within a rugged and stable design.

The MFC 2100 Series is recommended for system integration in industrial and analytical applications.


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