More than simply plug-and-play sensors for seamless gas detection

The Sensorix Satellix range includes both electrochemical (EC) sensors and pellistors for LEL monitoring. Each sensor comes with a special socket and a programmed EPROM to ensure full compatibility with the Satellite XT transmitter, a device widely used in the semiconductor industry.

The Satellix range can accurately detect over 30 toxic, corrosive, and flammable gases commonly used in semiconductor manufacturing. These include hydrides such as AsH₃, PH₃, SiH₄, B₂H₆, and SeH₂, as well as HF, HCl, NH₃, H₂, Cl₂, and HBr. It can also identify additional gases like Br₂, CH₃F, ClF₃, SF₆, SO₂, NF₃, NO, NO₂, and O₂.

Customers without a Satellite XT transmitter can also benefit from Sensorix’s developments. Most of the exotic gases detected by the Satellix sensor can also be identified by other Sensorix sensors in formats such as 4S, 7S, or Classic. Additionally, the Sensorix Smart sensor provides features similar to those of the Satellix sensor in a compact 16 mm-diameter design. The Smart EPROM can be programmed based on customer needs. Upon request, Sensorix sensors can be customised with various mechanical adaptations.