• New Benchtop Scientific Spectroscopic Ellipsometer

Environmental Laboratory

New Benchtop Scientific Spectroscopic Ellipsometer

Mar 01 2013

Horiba Scientific (France), a global specialist with over 20 years of experience in phase modulation Ellipsometry technology, is pleased to announce the launch of the UVISEL 2, a new generation of scientific spectroscopic ellipsometers. The UVISEL 2 is a fully automated platform that provides a patented vision system, 8 computer selectable, achromatic spot sizes, and fast scanning, high-resolution monochromators, making it a unique solution for efficient and rapid thin film characterisation over a broad spectral range of 190-2100nm.

The UVISEL 2 is a highly automated instrument providing automatic goniometer, automatic XYZ stage, automatic sample adjustment and automatic microspot optics. Microspots, combined with a real-time vision system, allows straightforward and accurate spot positioning on a sample. A selection of eight achromatic spots (down to 35µm) allows the user to perform measurements on a broad spectral range even with a small spot size. This unique system always allows an image to be obtained, whether on rough, smooth, transparent or reflective surfaces.

A robust phase modulation control with the new electronics makes the UVISEL 2 the most sensitive and accurate spectroscopic ellipsometer on the market. It is capable of characterising advanced optical and material properties (e.g., anisotropy, gradient), detecting very thin layers (e.g., graphene) and can follow ultra fast kinetic phenomena at up to 1ms per point. The detection systems in VIS-FUV and NIR have also been enhanced to provide very low stray light and faster acquisition.

The powerful DeltaPsi2 software controls the UVISEL 2, offering the largest range of data acquisition and advanced modelling features. New automatic troubleshooting facilitates the diagnosis of problems. And Horibas new automatic calibration procedure using integrated reference samples ensures easy calibration. The user interface is intuitive and customised to meet the requirements of both experienced scientists and newcomers.

“The UVISEL 2 combines unique features in terms of automation, performance, ease-of-use and advanced software, providing unique optimal working conditions for accurate thin film thickness measurement and optical analysis,” stated Professor Stergios Logothetidis, Aristotle University of Thessaloniki, Greece. “In fact, by combining these features into one ellipsometer, Horiba has insured that the UVISEL 2 is ideal for both research and industrial quality control of thin films.”


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