A sensor to measure arsine gas in the ppb range.
Mar 09 2022
Arsine has a dubious history; it was used as a component for chemical weapons. Today, it is ubiquitous in the semiconductor industry. Arsine is widely used as a large-scale doping gas and in considerable amounts for thermal doping of silicon in the diffusion process and in ion implantation. To ensure safety, these processes must be controlled and monitored by precise and reliable electrochemical arsine sensors.
In This Edition STA Annual Guide - Read it Here Water/Wastewater - Continuous remote water quality monitoring networks Environmental Laboratory - The Important Role of ICP-MS in Unde...
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