Gas Detection
A sensor to measure arsine gas in the ppb range.
Mar 09 2022
MEMBRAPOR recently launched the AsH3/C-1 and the AsH3/M-1, two exceptionally sensitive sensors, which measure arsine, an extremely toxic gas, to be measured within the ppb range.
Arsine has a dubious history; it was used as a component for chemical weapons. Today, it is ubiquitous in the semiconductor industry. Arsine is widely used as a large-scale doping gas and in considerable amounts for thermal doping of silicon in the diffusion process and in ion implantation. To ensure safety, these processes must be controlled and monitored by precise and reliable electrochemical arsine sensors.
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AET 28.2 April/May 2024
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