Monolithic MEMS Mass Flow Sensor for Liquids and Gases

For gases and liquids, the mass flow sensor SiF2011, distributed by IS-LINE (Germany), is based on a patented monolithic MEMS sensor element of SiFlo Technologies. The sensor is suitable both for gases and for liquids and can be used for the direct measurement in the flow range of 0 to 2 slpm (standard liters per minute). Andre flow ranges can be created customised. 

The solution uses a thermal process as a measuring principle: it consists of a heating element and two differentially arranged thermocouples. The temperature gradient is a measure of the flow rate. In contrast to the conventional technology come directly from the heating element and sensing resistors with the medium to be measured in contact, it is characterised in that the sensor element is completely inside a monolithic semiconductor. Hence the media touches only the durable protective layer of the sensor, and so is protected from contamination, condensation and abrasion. 

The SiF2011 consists of a compatible to standard medical flow housing and a PCB with the complete signal conditioning. The sensor provides both an analog output (0 to 5V) and a digital I2C interface, is characterised by a short response time (<8 ms) and is in the extended temperature range of -25 ° C to + 85 ° C. For convenient evaluation of the demonstration kit SiF3011 is available.