New Pressure Sensor Technology Provides Ten Times Greater Accuracy and Stability  

The new TERPS (Trench Etched Resonant Pressure Sensor) technology platform from GE Sensing & Inspection Technologies (UK) allows accuracy and stability greater by a factor of ten over existing piezoresistive pressure sensors, while significantly extending the pressure range capability conventionally associated with resonating pressure technology (RPT) sensors. TERPS technology is the result of extensive research and development into the design and manufacture of silicon resonating pressure sensors with a wide range of applications, from aerospace to sub-sea and from process engineering to industrial instrumentation.

As Steve Sajben, product manager for pressure sensors, explains, “Through our Druck heritage, we have been able to offer a resonant silicon product in the RPT Series for some years. Over this time we have continued to develop our sensor expertise, both within GE and in collaboration with Universities. The technology and manufacturing process developments we have explored and created now allow us to produce a pressure sensor with all the inherent accuracy and stability of resonant silicon, but with significantly greater capability in terms of pressure range, temperature range, and mechanical packaging.”